Specification
CAS No.: 75-73-0
EINECS No.: 200-896-5
UN No.: UN1982
Purity: 99.999%
Dot Class: 2.2
Appearance: Colorless
Grade Standard: Industrial Grade, Refrigerant Grade
Package Size: 40Ltr Cylinder, 50Ltr Cylinder
Filling Net Weight/Cyl: 30Kgs, 38Kgs
QTY Loaded in 20'Container: 250 Cyls, 250 Cyls
Total Net Weight: 7.5 Tons, 9.5 Tons
Cylinder Tare Weight: 50Kgs, 55Kgs
Valve: CGA 580
Product Content
Specification:99.999%
Oxygen+Argon:≤1ppm
Nitrogen:≤4 ppm
Moisture(H2O):≤3 ppm
HF:≤0.1 ppm
CO:≤0.1 ppm
CO2:≤1 ppm
SF6:≤1 ppm
Halocarbynes:≤1 ppm
Total Impurities:≤10 ppm
Application
1. Refrigerant:
Tetrafluoromethane is sometimes used as a low temperature refrigerant.
2. Etching:
It is used in electronics micro-fabrication alone or in combination with oxygen as a plasma etchant for silicon, silicon dioxide, and silicon nitride.